JPH01156565U - - Google Patents
Info
- Publication number
- JPH01156565U JPH01156565U JP5236288U JP5236288U JPH01156565U JP H01156565 U JPH01156565 U JP H01156565U JP 5236288 U JP5236288 U JP 5236288U JP 5236288 U JP5236288 U JP 5236288U JP H01156565 U JPH01156565 U JP H01156565U
- Authority
- JP
- Japan
- Prior art keywords
- barrier
- metal layer
- alloy layer
- schottky
- barrier metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims 8
- 229910052751 metal Inorganic materials 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5236288U JPH01156565U (en]) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5236288U JPH01156565U (en]) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156565U true JPH01156565U (en]) | 1989-10-27 |
Family
ID=31278363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5236288U Pending JPH01156565U (en]) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156565U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009253141A (ja) * | 2008-04-09 | 2009-10-29 | National Institute Of Advanced Industrial & Technology | 素子用電極およびその製造方法と、該素子用電極を備えた電子デバイス |
-
1988
- 1988-04-19 JP JP5236288U patent/JPH01156565U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009253141A (ja) * | 2008-04-09 | 2009-10-29 | National Institute Of Advanced Industrial & Technology | 素子用電極およびその製造方法と、該素子用電極を備えた電子デバイス |
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